Vacuum Sensor Card Capacitance Manometer and Piezo, for Series 937B and 946 Controllers.
MKS Part Number: 100015267.
The MKS Vacuum Sensor Card supports capacitance manometers and Piezo sensors with the 937B and 946 vacuum system controllers.
These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.
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