Ebara ESR20N ECO N2 Multistage Dry Vacuum Pump, 120cfm 2000l/m, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, PN: 202610
P1012636
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The Ebara ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The Ebara ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr. This listing is for the sale of the Ebara ESR20N ECO N2 Multistage Dry Vacuum Pump, 120cfm 2000l/m, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, PN: 202610.
- Applications
- Sputtering
- PVD
- Load Lock and Transfer
- Ashing
- Ion Implanter
- Etch
- Clean Gases and Processes
- Benefits and Features of the Ebara EV-A series dry rotary lobe pumps.
- Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
- No Nitrogen purge required for ESR20N in clean applications
- Variable pumping speed to match application requirements
- High performance brushless DC motors
- State-of-the-art control and monitoring devices
- Idle mode can be employed for increased utility savings
- SEMI S2 assessed, NRTL Listed, CE Marked
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